Diagnostics

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Automatized system for microdefects &
microimpurities control in semiconductors
by deep levels spectroscopy (DLTS)
Usage Fee (Inc. VAT): $__
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Compact CCD
Spectrometers
Thorlabs
Usage Fee (Inc. VAT): $__
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Computerized
micro-profilometer for surface
morphology monitoring
Usage Fee (Inc. VAT): $__
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Precision control of
electrical parameters of
semiconductor structures
Usage Fee (Inc. VAT): $__
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Ellipsometry for
film thickness
characterization
System reparation is needed
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Scanning
Electron
Microscope
System reparation is needed
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Complex for MDS
structures electrical
parameters measurements
Usage Fee (Inc. VAT): $__
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High resolution
optical microscope
Neophot  32 (ZEISS, Germany)
Usage Fee (Inc. VAT): $__
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Temperature-field
characterization of
semiconductor structures
Usage Fee (Inc. VAT): $__
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Analysis of the electrical
characteristics of IC & LIC elements,
HP 4145, Hewlett Packard, (USA)
Usage Fee (Inc. VAT): $__
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Equipment for
lux-ampere characteristic
measurements
Usage Fee (Inc. VAT): $__
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Surface resistance mapping of
semiconductor wafers and process layers:
RS-30, Prometrix (USA).
Usage Fee (Inc. VAT): $__
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Heat-cold
system
Tabaico
Usage Fee (Inc. VAT): $__
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Microscope system
“MSE-4” for films
thickness control
Usage Fee (Inc. VAT): $__
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System for films
surface and junction
depth control
Usage Fee (Inc. VAT): $__
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Monochromator MDR-23
for thin films specrtal
measurements
Вартість робіт за годину: $__
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Optical
microscope
system
Usage Fee (Inc. VAT): $__
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System for
angle-lapping
structures control
Usage Fee (Inc. VAT): $__
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System for
volt-ampere characteristic
measurements
Usage Fee (Inc. VAT): $__
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System
for gases
leak-detection
Usage Fee (Inc. VAT): $__